Problem $3($Surface Micromachining$)$

Read over the mumps process $($chapter $1$ only$)$ in the internet $($Class#$3$ webpage link$)-$

$(1)$ please determine the figures $($Fig$.1\mathrm{.}1$ to Fig. $1\mathrm{.}16)$ where an optical mask has been used

for the process and what is the total number of masks?

$(2)$ draw the top view of the masks and indicate "bright" or "dark" for each mask to make an

electro$-$static wobble micromotor $($hand drawing is fine$)-$ the top view in Fig. Problem $3.$