Question: Problem 4 ( 1 5 % ) The capacitance - voltage characteristic at low and high frequency for a Si _ ( - ) SiO
Problem
The capacitancevoltage characteristic at low and high frequency for a SiSiOMOS capacitor is
shown below. Cmaxtimes FcmCmintimes Fcm Si dielectric constant is
SiO dielectric constant is
a Does this correspond to a ptype or ntype substrate? Which branch is high frequency?
b Draw MOS diagrams corresponding to point AB and C
c Calculate the oxide thickness in nanometers.
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