Question: Problem 4 ( 1 5 % ) The capacitance - voltage characteristic at low and high frequency for a Si _ ( - ) SiO

Problem 4(15%)
The capacitance-voltage characteristic at low and high frequency for a Si_(-)SiO_(2)MOS capacitor is
shown below. C_(max)=4.3\times 10^(-8)(F)/(c)m^(2),C_(min)=1.45\times 10^(-8)(F)/(c)m^(2). Si dielectric constant is 11.7,
SiO_(2) dielectric constant is 3.9.
(a) Does this correspond to a p-type or n-type substrate? Which branch is high frequency?
(b) Draw MOS diagrams corresponding to point A,B, and C .
(c) Calculate the oxide thickness in nanometers.
Problem 4 ( 1 5 % ) The capacitance - voltage

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