Question: Task 2 [ 2 0 points ] : The cross - section of a SOI wafer with a photoresist pattern on top is shown. The

Task 2[20 points]: The cross-section of a SOI wafer with a photoresist pattern on top is shown. The pattern will be etched by a plasma. You can assume that the etching is \(100\%\) anisotropic; that the etching selectivity of silicon: \(\mathrm{SiO}_{2}\) :photoresist \(=2: 1: 1\); and that the etch rate of silicon is \(0.1\mu \mathrm{~m}/\mathrm{min}\). Draw cross-sections of the wafer after
a)5 minutes of etching;
b)7 minutes of etching.
Be sure to specify relevant angles and dimensions for each cross-section.
*** Please do not provide AI or Chatgpt answer. I know how to use AI tools. Please provide the solution in details and sketch. Thank you.
Task 2 [ 2 0 points ] : The cross - section of a

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