Question: Task 2 [ 2 0 points ] : The cross - section of a SOI wafer with a photoresist pattern on top is shown. The
Task points: The crosssection of a SOI wafer with a photoresist pattern on top is shown. The pattern will be etched by a plasma. You can assume that the etching is anisotropic; that the etching selectivity of silicon: mathrmSiO :photoresist : : ; and that the etch rate of silicon is mu mathrm~mmathrmmin Draw crosssections of the wafer after
a minutes of etching;
b minutes of etching.
Be sure to specify relevant angles and dimensions for each crosssection.
Please do not provide AI or Chatgpt answer. I know how to use AI tools. Please provide the solution in details and sketch. Thank you.
Step by Step Solution
There are 3 Steps involved in it
1 Expert Approved Answer
Step: 1 Unlock
Question Has Been Solved by an Expert!
Get step-by-step solutions from verified subject matter experts
Step: 2 Unlock
Step: 3 Unlock
