Question: -. The average distance traveled by particles between collision is called the mean free path 5103/P(cm), where P is pressure in Torr. In typical plasmas

-. The average distance traveled by particles between collision is called

-. The average distance traveled by particles between collision is called the mean free path 5103/P(cm), where P is pressure in Torr. In typical plasmas of interest, the camber pressure ranges from 1Pa to 150Pa. What are the corresponding density of gas molecules (cm3) and the mean free path? -. Fluorine (F) atoms etch Si rate given by Etch rate (nm/min)=2.861013nFT1/2exp(Ea/RT) where nF is concentration of F atoms (cm3),T the temperature (K), and Ea and R the activation energy (2.48kcal/mol) and gas constant (1.987calK), respectively. If nF is 31015, calculate the etch rate of Si at room temperature. Reference (103 Page) Gray S. May, "Fundamentals of Semiconductor Fabrication

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