Question: The minimum feature size required to be created is 1 2 5 . 0 nm . If the photolithography system has numerical aperture 0 .
The minimum feature size required to be created is nm If the photolithography system has numerical aperture which of the following options represents the most costeffective light source that is capable of achieving the minimum feature size?. Assume that all three options have the same working lifetime.
Option : nm light;
Option : nm light,
Option : nm light,
Step by Step Solution
There are 3 Steps involved in it
1 Expert Approved Answer
Step: 1 Unlock
Question Has Been Solved by an Expert!
Get step-by-step solutions from verified subject matter experts
Step: 2 Unlock
Step: 3 Unlock
