Question: The minimum feature size required to be created is 1 2 5 . 0 nm . If the photolithography system has numerical aperture 0 .

The minimum feature size required to be created is 125.0 nm. If the photolithography system has numerical aperture 0.84, which of the following options represents the most cost-effective light source that is capable of achieving the minimum feature size?. Assume that all three options have the same working lifetime.
Option 1: 308.0 nm light; 3200.
Option 2: 248.0 nm light, 5500.
Option 3: 193.0 nm light, 9000.

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