Question: When measuring films, the probe measures multiple points on the wafer, and results in a wafer - map. Two main measurements result: the mean which

When measuring films, the probe measures multiple points on the wafer, and results in a "wafer-map". Two main measurements result: the mean which is the average thickness and the standard deviation which tells us what?
the uniformity of the film across the entire wafer
the number of transistors on the wafer
the uniformity of the silicon substrate
the chemical composition of the film
When measuring films, the probe measures multiple

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