Question: Which statement is correct for e - beam interaction with resist? A ( ) primary beam point spread determine the resolution alone. B ( )

Which statement is correct for e-beam interaction with resist? A () primary beam point spread determine the resolution alone. B () proximity effect is determined by backscattered electron not primary electron spread. C () secondary electrons give more energy to resist than primary electrons. D () Higher energy generates smaller point spread, but larger backscatter electron distribution.

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