Question: You have fabricated an array of rectangular double - clamped silicon beams for detecting small airborne droplets. The beams measure 1 0 0 nm (

You have fabricated an array of rectangular double-clamped silicon beams for detecting small
airborne droplets. The beams measure 100 nm (thick) by 200 nm (wide) by 5\mu m (long) and have
the elasticity modulus and density values stated below.
E M (Si)=110 GPa (1 GPa =109 N/m 2
)
\rho (Si)=2330 kg/m 3
(a) Assuming no damping, calculate the natural resonance frequency (in MHz) and quality (Q)
factor (assuming their resonance has a bandwidth of 30 kHz) of the beams.
(b) How much would you expect the resonance to shift (in kHz) if the beams capture a 50 fg (1 fg =
10-15 g) droplet?
You have fabricated an array of rectangular

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