Question: You have fabricated an array of rectangular double - clamped silicon beams for detecting small airborne droplets. The beams measure 1 0 0 nm (
You have fabricated an array of rectangular doubleclamped silicon beams for detecting small
airborne droplets. The beams measure nm thick by nm wide by mu m long and have
the elasticity modulus and density values stated below.
E M Si GPa GPa Nm
rho Si kgm
a Assuming no damping, calculate the natural resonance frequency in MHz and quality Q
factor assuming their resonance has a bandwidth of kHz of the beams.
b How much would you expect the resonance to shift in kHz if the beams capture a fg fg
g droplet?
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