Copper Interconnect Technology(1st Edition)
Authors:
Christoph Steinbruchel ,Barry L Chin
In Stock: 1 Left
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$0
Solution Manual Includes
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$9.99
Book details
ISBN: 0819438979, 978-0819438973
Book publisher: SPIE Publications
Book Price $0 : Copper Interconnect Technology Is Expected To Be A Key Component In The Quest To Create More Powerful CPUs And Memory Chips. This Text Examines The Role Of Copper In Future Interconnects, Presents The Range Of Problems Involved, And Explains How The Solutions Are Being Found.Contents - Introduction - Interconnect Issues - Copper Deposition - Copper Patterning - Interlayer Dielectrics - Cu/ILD Barriers - Current Practice - Index
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