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Nanoparticle Engineering For Chemical Mechanical Planarization Fabrication Of Next Generation Nanodevices(1st Edition)

Authors:

Ungyu Paik, Jea-Gun Park

Free nanoparticle engineering for chemical mechanical planarization fabrication of next generation nanodevices 1st
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Book details

ISBN: 1420059114, 978-1420059113

Book publisher: CRC Press