An important category of MEMS devices is micro-actuators. These devices produce mechanical motion in response to some
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An important category of MEMS devices is micro-actuators. These devices produce mechanical motion in response to some electrical signal. Search the web for information and write a short paragraph explaining one way that such a device might work.
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One common type of microactuator in MEMS MicroElectroMechanical Systems devices is the electrostatic ...View the full answer
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Chemistry For Engineering Students
ISBN: 9780357026991
4th Edition
Authors: Lawrence S. Brown, Tom Holme
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