In this chapter we introduced four measurement techniques that yield the impurity concentration in semiconductor layers, namely,
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In this chapter we introduced four measurement techniques that yield the impurity concentration in semiconductor layers, namely, SIMS, sheet resistivity (SR) measurements, Hall effect measurements, and ECV profiling. Complete the following table to compare these four techniques with respect to the stated application requirements.
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Application requirement SIMS SR Hall ECV Determinatio...View the full answer
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