Question: 1 . Consider a MOS capacitor with Al ( e M = 4 . 1 5 eV ) on a n - type Si wafer.

1. Consider a MOS capacitor with Al (eM =4.15 eV) on a n-type Si wafer. The doping is ND =
31017 cm-3
. The gate oxide (SiO2) thickness tox =10 nm.
(a) Calculate the surface potential at the onset of strong inversion.
(b) Calculate the work function difference MS.
(c) If the flat band voltage VFB is measured to be -0.5 V, calculate the total oxide charge
density.
(d) Calculate the threshold voltages VT.

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