Question: 1 . Consider a MOS capacitor with Al ( e M = 4 . 1 5 eV ) on a n - type Si wafer.
Consider a MOS capacitor with Al eM eV on a ntype Si wafer. The doping is ND
cm
The gate oxide SiO thickness tox nm
a Calculate the surface potential at the onset of strong inversion.
b Calculate the work function difference MS
c If the flat band voltage VFB is measured to be V calculate the total oxide charge
density.
d Calculate the threshold voltages VT
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