Question: 3 ) Problem 9 . 1 2 9 . 1 2 . a . Using schematic diagrams, show qualitatively how changing the gas pressure in
Problem
a Using schematic diagrams, show qualitatively how changing the gas pressure in a standard PVD system using an appropriate Sc value for this type of system can affect the deposition profile when depositing a material on a narrow trench structure.
b In a similar fashion, show how changing the sticking coefficient affects the deposition profile when depositing a material on topography with a step.
Step by Step Solution
There are 3 Steps involved in it
1 Expert Approved Answer
Step: 1 Unlock
Question Has Been Solved by an Expert!
Get step-by-step solutions from verified subject matter experts
Step: 2 Unlock
Step: 3 Unlock
