Question: 5. Develop a process flow chart for fabrication of pressure sensor shown below. For each step, select appropriate tools and describe the process. Pt electrodes

5. Develop a process flow chart for fabrication of pressure sensor

5. Develop a process flow chart for fabrication of pressure sensor shown below. For each step, select appropriate tools and describe the process. Pt electrodes SiO2 Si Substrate (can -be bond at the end) 5. Develop a process flow chart for fabrication of pressure sensor shown below. For each step, select appropriate tools and describe the process. Pt electrodes SiO2 Si Substrate (can -be bond at the end)

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