Question: A gas molecule with diameter 0 . 3 n m , with molecule mass 4 0 , at 2 5 C and pressure 1 0

A gas molecule with diameter 0.3nm, with molecule mass 40, at 25C and pressure 10-4Pa. Assume
one monolayer contain 1015 molecules per cm2.
a. Find out the deposition rate with unit MLs(mono layer per second).
b. To deposit 99.99% pure film at 2mh. What is the impurity gas must be kept in the process
chamber?|
A gas molecule with diameter 0.3nm, with molecule mass 40, at

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