Question: A parallel-plate capacitor is suspended by two fixed-guided cantilever beams, each with length, width and and thickness of I, w, and t, respectively. The material

A parallel-plate capacitor is suspended by two fixed-guided cantilever beams, each with length, width and

and thickness of I, w, and t, respectively. The material is polysilicon, with Young's modulus of 120 GPa. (= 400 um, w =

and thickness of I, w, and t, respectively. The material is polysilicon, with Young's modulus of 120 GPa. (= 400 um, w = 10 um, and t= 1 um). The gap xo between two plates is 2 um. The area of the plate is 500x500 um?. Calculate the following: a) Show that the vertical displacement under applied force F is equal to FP/12EI b) The spring constant associated with the actuator. c) Determine the pull-in voltage. d) Determine the amount of vertical displacement when a voltage of 0.1 volt is applied. Repeat the calculation of displacement for a voltage of 3.7 volt. anchor (electrostatie force) ancher

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