A particular silicon device needs to have an implant of boron with a peak at a...
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A particular silicon device needs to have an implant of boron with a peak at a depth of 0.3 114m and a peak concentration of 10^17 cm^-3. Determine the implant energy and dose that should be used for this process. Find the as-implanted junction depth if the substrate is n-type with a concentration of 10^15 cm^-3. A particular silicon device needs to have an implant of boron with a peak at a depth of 0.3 114m and a peak concentration of 10^17 cm^-3. Determine the implant energy and dose that should be used for this process. Find the as-implanted junction depth if the substrate is n-type with a concentration of 10^15 cm^-3.
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Answer The implant energy is The dose is calculated from the relation In order to find please ref... View the full answer
Related Book For
The Science And Engineering Of Materials
ISBN: 9781305076761
7th Edition
Authors: Donald R. Askeland, Wendelin J. Wright
Posted Date:
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