a). Plot the deposition rate (on a log scale) versus 1/T (Kelvin), for 600-1200C, for a CVD system with the following parameter values: hG = 0.5 cm sec-1 KS = 4x106 exp(-1.45 eV/kT) cm sec-1. Partial pressure of incorporating species = 1 Torr. Total pressure = 1 atm CT/n=1/10,000. Identify the reaction and mass transfer limited regimes. (b). Redo the problem when the total pressure is decreased to 1 Torr, so that hG increases by 100 times. Assume that the partial pressure of the incorporating species remains the same, and CT decreases by the same factor as the total pressure. (Since both the total pressure and the partial pressure of the incorporating species equal 1 Torr, this means that the gas is made up of only the incorporating species in this case.)