Question: A silicon - based micro cantilever with the following dimensions: Thickness: 2 m , Width: 2 0 m , Length: 3 9 . 4 m

A silicon-based micro cantilever with the following dimensions:
Thickness: 2m,
Width: 20m,
Length: 39.4m
Calculate the minimum detectable force using the designed cantilever (assuming only Johnson noise is present, the operating temperature is 300 K , and the bandwidth of the measurement circuit is 1 kHz ). Additionally, calculate the minimum detectable force when the output voltage of the WB circuit is less than 1V due to additional noise effects. Assume the cantilever material is silicon (with a Young's modulus of 155 GPa ), and the strain sensor material is aluminum (with a resistivity of 310-8*m), with a strain gauge thickness of 100 nm (assumed to have no effect on the effective spring constant of the silicon cantilever). In the calculation of resistance change in aluminum due to the applied force, assume no change in the width and thickness of the gauge. For the calculation of the tensile stress due to the applied force, refer to the method outlined in the e-class announcement (note that stress varies along the length of the cantilever when a force is applied to the free end).
A silicon - based micro cantilever with the

Step by Step Solution

There are 3 Steps involved in it

1 Expert Approved Answer
Step: 1 Unlock blur-text-image
Question Has Been Solved by an Expert!

Get step-by-step solutions from verified subject matter experts

Step: 2 Unlock
Step: 3 Unlock

Students Have Also Explored These Related Mechanical Engineering Questions!