Question: An engineer is specifying a silicon dioxide thickness to use as an etch mask for a ( 4 2 % mathrm {

An engineer is specifying a silicon dioxide thickness to use as an etch mask for a \(42\%\mathrm{KOH}\) etch on a (100) silicon wafer. The etching temperature is \(80^{\circ}\mathrm{C}\), and the desired etching depth is \(400\mu \mathrm{~m}\). Calculate the required silicon dioxide thickness for these etch conditions. If the engineer wants to have 2000 Angstroms of silicon dioxide remaining after the etch, what oxidation time should be used for an \(1100^{\circ}\mathrm{C}\) wet oxidation? Assume a 25 Angstrom native oxide thickness. An evaporator is used to deposit aluminum. The aluminum charge is maintained at a uniform temperature of \(1100^{\circ}\mathrm{C}\). If the evaporator planetary has a radius of 40 cm and the diameter of the crucible is 5 cm , what is the deposition rate of aluminum? Clearly state all assumptions.
An engineer is specifying a silicon dioxide

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