Question: At room temperature for a p - type silicon substrate MOS capacitor with NA = 1 0 1 8 cm - 3 and an oxide
At room temperature for a ptype silicon substrate MOS capacitor with NA cm and
an oxide thickness of nm with Ko :
a Compute fermi potential F
b Calculate the maximum space charge width
c Compute the depletion layer thickness, W when s F
d Compute the electric field at the surface, Es when s F
e Find oxide capacitance, Cox.
f Compute the threshold voltage, VT when s F
Note that
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