Question: At room temperature for a p - type silicon substrate MOS capacitor with NA = 1 0 1 8 cm - 3 and an oxide

At room temperature for a p-type silicon substrate MOS capacitor with NA =1018 cm-3 and
an oxide thickness of 2nm with Ko =3.9:
a) Compute fermi potential F
b) Calculate the maximum space charge width
c) Compute the depletion layer thickness, W, when s =2F
d) Compute the electric field at the surface, Es, when s =2F
e) Find oxide capacitance, Cox.
f) Compute the threshold voltage, VT, when s =2F
Note that =1
2

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