EM Coils

$($a$)$ With planar

contacts

$($b$)3-$D coil with

a

core

make different designs for each other specifying the complete lithographic process using the following dimensions and materials

a$)$ coil width $10$ micro meters

coil thickness $10$ micrometers

spacing between each coil $10$ micro meters gap between bridge and coil $20$ micrometers

bridge width $20$ micro meters materials to be used are coil$-$copper, rod$-$ Nickel

b$)17$ coil turns

coil width $25$ micrometers

core thickness $50$ micrometers

height $200$ micrometers materials to be used are coil copper and rod gold or Nickel

give a detailed discussion with process drawings and mask drawings include every step with etching process and times that it is exposed to UV light Electroplating can be considerd.