Question: Microfabrication technology can also be used to make mechanical components ( such as beams and membranes ) . When combined with electronics, this enables the

Microfabrication technology can also be used to make mechanical components (such as beams and
membranes). When combined with electronics, this enables the technology called micro-
electromechanical systems (MEMS). Let us consider a Si beam that is clamped on both ends to a Si
wafer (as presented in the figure below). Sketch out the microfabrication steps you would use
starting with a Si wafer to achieve such a beam.
 Microfabrication technology can also be used to make mechanical components (such

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