Question: Please help! Answer in detail for thumbs up. Chapter 5 Exercise 11 What concentration of fluorine is required to etch Si at a rate of

Please help! Answer in detail for thumbs up.

Chapter 5 Exercise 11 What concentration of fluorine is required to etch Si at a rate of 5000 /min at a temperature of 250 C? By hat percent must the temperature be raised to have the same equivalent etch rate that a 1% increase in the fluoride concentration has

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