Question: This problem deals with a capacitive accelerometer structure shown below. The accelerometer consists of a cube of silicon ( side dimension, a , of 1

This problem deals with a capacitive accelerometer structure shown below. The accelerometer consists of a cube of silicon (side dimension, a, of 1mm) that is supported using two beams as shown. Assume the following dimensions for the accelerometer:
* The side of the proof mass cube, a,: 1mm * Length of each beam, L =50m
* Width of each beam, w =5m * Thickness of each beam, t =5m
* Gap between proof mass and electrode, g =5m
* Density of Si =2330 Kg/m3
* Young's Modulus of Si : 190 GPa (all directions)
Calculate the sensitivity of this accelerometer to acceleration in z direction, \Delta C/\Delta a.
 This problem deals with a capacitive accelerometer structure shown below. The

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