Question: This problem deals with a capacitive accelerometer structure shown below. The accelerometer consists of a cube of silicon ( side dimension, a , of 1
This problem deals with a capacitive accelerometer structure shown below. The accelerometer consists of a cube of silicon side dimension, a of mm that is supported using two beams as shown. Assume the following dimensions for the accelerometer:
The side of the proof mass cube, a: mm Length of each beam, L m
Width of each beam, w m Thickness of each beam, t m
Gap between proof mass and electrode, g m
Density of Si Kgm
Young's Modulus of Si : GPa all directions
Calculate the sensitivity of this accelerometer to acceleration in z direction, Delta CDelta a
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