Using a surface micromachining process with a 2-um sacrificial layer thickness and a 3-m structural layer...

 

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Using a surface micromachining process with a 2-um sacrificial layer thickness and a 3-m structural layer thickness, design a differential X-axis accelerometer (acceleration in plane with the substrate) that has the electrode capacitances 0.2 pF, the sensitivity to acceleration is AC/|| = 1 fF/G, and the maximum range is 5 G. Optimize your design for the smallest rectangular footprint. Assume that the capacitor gap is d = 2 m, the smallest mechanical structure width is w = 2 m, and the Young's modulus is E = 150 GPa. Cwl: Cw1 - = Using a surface micromachining process with a 2-um sacrificial layer thickness and a 3-m structural layer thickness, design a differential X-axis accelerometer (acceleration in plane with the substrate) that has the electrode capacitances 0.2 pF, the sensitivity to acceleration is AC/|| = 1 fF/G, and the maximum range is 5 G. Optimize your design for the smallest rectangular footprint. Assume that the capacitor gap is d = 2 m, the smallest mechanical structure width is w = 2 m, and the Young's modulus is E = 150 GPa. Cwl: Cw1 - =

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