Question: using deal and grove formula, Create a matlab code to show the General relationship for thermal oxidation of silicon using dry oxidation and wet oxidation.
using deal and grove formula, Create a matlab code to show the General relationship for thermal oxidation of silicon using dry oxidation and wet oxidation. The solid line represents the general relationship, the dotted lines its two limiting forms. The output of the matlab program expected to be as the graph i have attached
100 A/2 10 T 2 = B(L+T) (2+3)=' -- + Ax. = B(t+T) HO O N 1300C ODO 1200 THIS WORK A 1100 1000 REF 7 920 REF 13 800 REF 14 0.1 0.050.1 1.0 700 10 10% 10' 10 +T A/4B
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