Question: We consider a n - channel MOSFET with n + polysilicon gate ( which implies that EF = Ec ) . The acceptor concentration in
We consider a nchannel MOSFET with n polysilicon gate which implies that EF Ec The acceptor concentration in the semiconductor is cm The oxide thickness is nm For the moment we assume that there is no trapped charge in the oxide. apts Calculate the threshold voltage of this device and draw the band diagram at threshold voltage. bpts Replace the oxide with silicon nitride, SiNSiN and maintain the thickness of gate dielectric layer. Calculate new EOT of this MOSFET. cpts A disadvantage of SiN is the trapped positive charge at the interface between the insulator and in case this trapped charge has a density of cm which SiN thickness is required to maintain the threshold voltage as in question adpts If SD distance is um what is the punchthrough voltage of aepts Is VDSV the device under SCLT
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