Question: We consider a n - channel MOSFET with n + polysilicon gate ( which implies that EF = Ec ) . The acceptor concentration in

We consider a n-channel MOSFET with n+ polysilicon gate (which implies that EF = Ec). The acceptor concentration in the semiconductor is 4.21018 cm-3. The oxide thickness is 10 nm. For the moment we assume that there is no trapped charge in the oxide. (a)(4pts) Calculate the threshold voltage of this device and draw the band diagram at threshold voltage. (b)(4pts) Replace the oxide with silicon nitride, Si3N4(Si3N4=7.5) and maintain the thickness of gate dielectric layer. Calculate new EOT of this MOSFET. (c)(4pts) A disadvantage of Si3N4 is the trapped positive charge at the interface between the insulator and in case this trapped charge has a density of 1.01012/cm2, which Si3N4 thickness is required to maintain the threshold voltage as in question (a).(d)(4pts) If S/D distance is 1um, what is the punch-through voltage of (a)(e)(4pts) Is VDS=2V, the device under SCLT?

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