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Introduction To Semiconductor Manufacturing Technology(2nd Edition)

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Hong Xiao

introduction to semiconductor manufacturing technology 2nd edition hong xiao 1510616535, 978-1510616530

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ISBN: 1510616535, 978-1510616530

Book publisher: SPIE--The International Society for Optical Engineering

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Introduction To Semiconductor Manufacturing Technology 2nd Edition Summary: IC chip manufacturing processes, such as photolithography, etch, CVD, PVD, CMP, ion implantation, RTP, inspection, and metrology, are complex methods that draw upon many disciplines. [i]Introduction to Semiconductor Manufacturing Technologies, Second Edition[/i] thoroughly describes the complicated processes with minimal mathematics, chemistry, and physics; it covers advanced concepts while keeping the contents accessible to readers without advanced degrees. Designed as a textbook for college students, this book provides a realistic picture of the semiconductor industry and an in-depth discussion of IC chip fabrication technology. The text focuses on current fabrication technologies, but older technologies are discussed for historical context.

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