Question: The MEMS devices discussed in this chapter apply macroscale machine elements, such as spur gears, hinges, and beams. Which of the following machine elements can

The MEMS devices discussed in this chapter apply macroscale machine elements, such as spur gears, hinges, and beams. Which of the following machine elements can and cannot be applied to MEMS, and why?

a. Ball bearing

b. Helical springs

c. Bevel gears

d. Rivets

e. Worm gears

f. Bolts

g. Cams

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