Question: A dry etch process is used to etch silicon dioxide (SiO2) off of silicon wafers. An engineer wishes to study the uniformity of the etching
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Can you conclude that the etch rates differ between the center and the edge?
Wafer Cer Edge 586 568 587 550 543 552 562 577 558 571 582 569 587 543 540 548 563 572 559 566 3 10
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