Question: A rapid thermal processing system for microelectronic manufacturing uses three concentric lamp heater arrays to keep the wafer temperature uniform. The gain matrix for the

A rapid thermal processing system for microelectronic manufacturing uses three concentric lamp heater arrays to keep the wafer temperature uniform. The gain matrix for the system is:The system experiences difficulties in controlling all three temperatures uniformly. Examine possible control difficulties using RGA and SVAanalyses. 3.38 2.50 K =3.20 2.38 0.986 3.13 2.33 0.953 1.054

3.38 2.50 K =3.20 2.38 0.986 3.13 2.33 0.953 1.054

Step by Step Solution

★★★★★

3.34 Rating (160 Votes )

There are 3 Steps involved in it

1 Expert Approved Answer

Step: 1 Unlock

For higherdimension process n 2 the RGA can be calculated from the expr... View full answer

Question Has Been Solved by an Expert!

Get step-by-step solutions from verified subject matter experts

Step: 2 Unlock

Step: 3 Unlock

Document Format (1 attachment)

38-E-C-E-P-C (309).docx

120 KBs Word File

Students Have Also Explored These Related Chemical Engineering Questions!

A heater for a semiconductor wafer has first-order dynamics, that is, the transfer function relating changes in temperature T to changes in the heater input power level P is where K has units [ C/Kw]...

A temperature control system for a distillation column is shown in figure. The temperature T of a tray near the top of the column is controlled by adjusting the reflux flow rate R. Draw a block...

A control system for controlling the pressure in a closed chamber is shown in Figure P8.4. The transfer function for the measuring element is and the transfer function for the valve is The controller...

please focus on these 3 questions and answer them based on the reading screenshots, do not use any outside sources. DO NOT USE ONLINE SOURCES, DO NOT COPY?PASTE FROM ONLINE SOURCES. ANSWER MUST BE...

Chapter 5: Hazardous Waste Site Clean-Up Technologies IN THIS CHAPTER Treatment technologies for contaminated hazardous waste sites Containment technologies for contaminated sites Innovative...

write report MAnAgEMENT ToOLS \& PRACTICE-ReadingS, PART 1 Sources: Robert C. Appleby (1991): Modern Business Administration. Pitman \& Cole, G. A. (1993): Management Theory and Practice. DP...

There are two problems due this week (each worth 35 points) as follows. Problem 1.6 (page 20) In comprehensive paragraphs, answerrequirements a to e. You will have 5 paragraphs total of four to five...

can i get a solution to this question please. Value: Document (include your file name) 15% of final grade How to complete: 1. Read the following Anniversary Party scheduling problem: As the project...

A and B face the choice of working in a safe mine at $200/wk or an unsafe mine at $300/wk. The wage differential between the two mines reflects the costs of the safety equipment in the safe mine. The...

4 Using the information from Question #3, assume that 50% of the bonds were retired on July 1, 2014 at 90. (15 points) a Calculate the gain (loss) on the retirement b Make the journal entry to record...

use sinking fund formula to solve this. Future value is 360, compounded monthly , 24 total payments, 2% interest rate

Complete the sequence

A researcher observes that more acts of vandalism are committed by same-sex gangs than by mixed-sex gangs. She theorizes that competition for recognition among equal-status peers increases the...

Identify the missing square A B D ?

Write it in C++. In each of the following situations, indicate whether f= O(g), or f= 2(g), or both f= o(g). 1. f(n) =n- 100 and g(n) =n- 200. 2. f(n)= nl/2 and g(n)= n2/3. 3. f(n)= 100n + log n and...

What will be the output? Question 7 class Test{ Not yet answered int x Marked out of int y: 1.00 public: P Flag question Test(int h)( x=h; y=0; cout

For the following oxidationreduction reactions, identify the half-reactions and label them as oxidation or reduction. (a) Cu(s) + Ni 2+ (aq) Ni(s) + Cu 2+ (aq) (b) 2 Fe 3+ (aq) + 3 Ba(s) 3 Ba 2+...

For the wire form shown use Castiglianos method to determine the vertical deflection of point A. Consider bending only and assume Eq. (428) applies for the curved part.

If the power absorbed by the 4k ohms resistor in the circuit shown is 36 mW, find Vs. 12 k

In the network shown, the power absorbed by the 4 ohms resistor is 100 W. Find Vs. 3 4 3

4. Suppose you are a portfolio manager and you plan to form a portfolio that consists of thre components, including a risk-free money market security, a stock, and a bond. The table belov shows the...

You have saved $5,000 for a down payment on a new car. The largest monthly payment you can afford is $350. The loan will have an 8% APR based on month payments. What is the most expensive car you can...

Waterways Continuing Problem 13 (Direct Method) Waterways prepared the balance sheet and income statement for the irrigation installation division for 2016. Now the company also needs to prepare a...