Calculate the undercut in etching a 10-(m-deep trench if the anisotropy ratio is (a) 200, (b) 2,
Question:
Calculate the undercut in etching a 10-(m-deep trench if the anisotropy ratio is
(a) 200,
(b) 2, and
(c) 0.5. Calculate the sidewall slope for these three cases?
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a The anisotropy ratio AR AR E 1 E 2 Where E 1 and E 2 are etch rates in two different crystallograp...View the full answer
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Related Book For
Manufacturing Processes for Engineering Materials
ISBN: 978-0132272711
5th edition
Authors: Serope Kalpakjian, Steven Schmid
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