Question: Calculate the undercut in etching a 10-(m-deep trench if the anisotropy ratio is (a) 200, (b) 2, and (c) 0.5. Calculate the sidewall slope for

Calculate the undercut in etching a 10-(m-deep trench if the anisotropy ratio is

(a) 200,

(b) 2, and

(c) 0.5. Calculate the sidewall slope for these three cases?

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a The anisotropy ratio AR AR E 1 E 2 Where E 1 and E 2 are etch rates in two different crystallograp... View full answer

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