If a square mask of side length 100 (m is placed on a {100} plane and oriented

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If a square mask of side length 100 (m is placed on a {100} plane and oriented with a side in the (110) direction, how long will it take to etch a hole 4 (um deep at 80°C using thylene-diamine / pyrocatechol? Sketch the resulting profile.

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Manufacturing Processes for Engineering Materials

ISBN: 978-0132272711

5th edition

Authors: Serope Kalpakjian, Steven Schmid

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Question Posted: Jul 18, 2016 09:26 AM

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If a square mask of side length 100 (m is placed on a {100} plane and oriented

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Manufacturing Processes for Engineering Materials

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