In a horizontal epitaxial reactor (see the accompanying figure), the wafers are placed on a stage (susceptor)

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In a horizontal epitaxial reactor (see the accompanying figure), the wafers are placed on a stage (susceptor) that is tilted by a small amount, usually l°-3°. Why is this procedure done?

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Manufacturing Processes for Engineering Materials

ISBN: 978-0132272711

5th edition

Authors: Serope Kalpakjian, Steven Schmid

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Question Posted: Jul 18, 2016 09:25 AM

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In a horizontal epitaxial reactor (see the accompanying figure), the wafers are placed on a stage (susceptor)

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Induction heating coil Vent Gas inlet Wafers Susceptor

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Manufacturing Processes for Engineering Materials

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