Lead titanate, PbTiO3, is a material having remarkable ferroelectric, pyroelectric, and piezoelectric properties [ J. Elec. Chem.
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Lead titanate, PbTiO3, is a material having remarkable ferroelectric, pyroelectric, and piezoelectric properties [ J. Elec. Chem. Soc., 135, 3137 (1988)]. A thin film of PbTiO3 was deposited in a CVD reactor. The deposition rate is given below as a function of a temperature and flow rate over the film.
What are all the things, qualitative and quantative, that you can learn from these data?
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Flow Rate (SCCM) Temperature (C) Deposition Rate (mg/cm2.h) 500 600 750 1000 650 750 800 650 750 800 650 750 800 650 750 800 0.2 0.8 1.2 0.35 1.0 1.5 0.53 1.45 2.0 0.55 1.5 2.0
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