Continuation of Problem 6-31. Suppose that the experimenter had also run four center points along with the 16 runs in Problem 6-31. The resistivity measurements at the center points are 8.15, 7.63, 8.95, and 6.48. Analyze the experiment again incorporating the center points. What conclusions can you draw now?

Problem 6-31.

Resistivity on a silicon wafer is influenced by several factors. The results of a 2⁴ factorial experiment performed during a critical processing step is shown in the following table:

 

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Run A B C D Resistivity 1 1.92 11.28 3 1.09 4 + 5.75 5 2.13 9.53 7 1.03 5.35 1.60 10 + 11.73 11 1.16 12 4.68 13 2.16 14 9.11 15 1.07 16 5.30 AIII IIII+ + + + + + + + UIII I + + + + IIII+ + + + AI | + +II + + II + + II + + 9.