Question: 1) What is multilevel metallization? Why is it necessary for chip fabrication? 2) What is aluminum metallization? Describe a chip critical layer and a noncritical
1) What is multilevel metallization? Why is it necessary for chip fabrication? 2) What is aluminum metallization? Describe a chip critical layer and a noncritical layer. 3) Explain the purpose of an ILD layer. Where is the ILD-1 layer located on a chip? 4) What is a thin film? List and describe six characteristics of an acceptable thin film. 5) Define the aspect ratio. Why is a high-aspect ratio important for ULSI devices? 6) Describe nucleation. 7) List the five major techniques for deposition. 8) Define chemical vapor deposition (CVD). 9) What are the four basic CVD chemical reactions? Give a short description of each reactio
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