1. You need to make a MEMS device that consists of a movable hinge plate for your photonics project. To build the hinge, you've designed the following layers of materials (color image) that require two oxide layers and two layers of polysilicon. As a final step, you will etch away the oxide layers to release the polysilicon hinge plate shown in the black and white images. staple Hinge pin Cross-Sectional View of Layers before Etching Poly Si - 2 Oxide Layer 2 Poly Poly Si - 1 Si-1 Oxide Layer 1 Plate silicon Hinged MEMS device after etching away oxide layers Hinge Pin Plate Staple grase List the process steps required to lithographically define all of these layers. Include: a. Process steps in proper sequence b. Photomasks required C. Chemical reactions to deposit materials d. Chemical reactions to etch materials