Question: 3. A CVD process is operating in reaction rate limited mode at 700 C and has an activation energy of 2 eV. At this temperature

3. A CVD process is operating in reaction rate limited mode at 700 C and has an activation energy of 2 eV. At this temperature the deposition rate is 1000 A/min. What deposition rate would you expect at 800 C ? If the measured deposition rate is much less than predicted, what might be the reason

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