5. A heater for a semiconductor wafer has first-order dynamics, that isthe transfer function relating changes in temperature T to changes in the heater input power level P is T'(s) P'(s) K TS + 1 Where K has units [S/Kw] and t has units [min]. The process is at steady state when an engineer changes the power input stepwise from 0.81 to 1.41Kw. She notes the following: i) The process temperature initially is 81C. i1) 10 minutes after changing the power input, the temperature is 235C. 111) 40 minutes later the temperature is 297C. a) What is K in the process transfer function? (5 points) b) What is t in the process transfer function? (5 points) c) If at another time, the engineer changes the power input linearly at a rate of 0.48Kw/min, what is the response of the process temperature T(t)? (10 points)