Question: Reading Question 2 A heater for a semiconductor wafer has first-order dynamics, that is, the transfer function relating changes in termperature T to changes in
Reading Question 2 A heater for a semiconductor wafer has first-order dynamics, that is, the transfer function relating changes in termperature T to changes in the heater input power P is T'(s) P'(s) TS + 1 Where K has units [C/KW) and t has units [min]. The process is at steady state when an engineer changes the power input stepwise from 1 to 1.5 Kw. She notes the following i. The process temperature is initially at 80C ii. Four minutes after changing the power input, the temperature is 230 C iii. Thirty minutes later the temperature is 280C (a) What are K and t in the process transfer function? (b) Derive the dynamic response of the process if the power input is changed from 1 to 2.0 Kw. (c) What will be the final temperature for the change mentioned in part (b)? -END
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