Question: Question 1 TS + 1 A heater for a semiconductor wafer has first order dynamics the transfer function relating changes in Temperature to changes in
Question 1 TS + 1 A heater for a semiconductor wafer has first order dynamics the transfer function relating changes in Temperature to changes in the T's) K heater input power level is where has units of Ckw and has units in minutes. The process is at steady state when plis) an engineer changes the power input stepwise from 3.76 to 8.88 KW. She notes the following 1) The process temperature initially is 8201C 2) Four minutes after changing the power input, the temperature is 243.43 3) Thirty minutes later the temperature is 376,35C What is the time constant in the process transfer function
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