Question: A ( 1 mu mathrm { ~m } mathrm { SiO 2 } ) layer is deposited on a (
A mu mathrm~mmathrmSiO layer is deposited on a Si substrate, and it is to be patterned and released over a cavity to form a freestanding cantilever beam having length mu mathrm~m and width mu mathrm~m If the beam is to have a clearance on all three free sides of mu mathrm~m draw the mask used for this etch process. Is it an isotropic or anisotropic etch? What is the depth of the trench? Ignore any possible problems due to undercutting.
This time, it is aimed to deposit some metal contacts before making the KOH bulk etch. Two candidate metals are Aluminum and Chromium. Based on etch selectivity of KOH which one should be used as metal contacts.
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