Question: A comb-drive actuator (CDA) is given below. Each finger is triangular. Finger width: w Finger spacing: g Number of fingers on one comb: N

A comb-drive actuator (CDA) is given below. Each finger is triangular. Finger

A comb-drive actuator (CDA) is given below. Each finger is triangular. Finger width: w Finger spacing: g Number of fingers on one comb: N a) Drive expression for the electrostatic energy stored in this CDA. b) Drive expression for the electrostatic force in this CDA. d) Derive displacement versus voltage for this CDA.

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