Question: A p - type ( Boron ) Diffusion is performed as follows. Predep: 3 0 min, 9 0 0 C , solid solubility Drive in:
A ptype Boron Diffusion is performed as follows.
Predep: min, C solid solubility
Drive in: min, C
a What is the deposited dose Q
b If the substrate is doped cm phosphorus, what is the junction depth xj
c What is the sheet resistance of the diffused layer?,
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