Question: A p - type ( Boron ) Diffusion is performed as follows. Predep: 3 0 min, 9 0 0 C , solid solubility Drive in:

A p-type (Boron) Diffusion is performed as follows.
Predep: 30 min, 900C, solid solubility
Drive in: 60 min, 1000C
(a) What is the deposited dose Q?
(b) If the substrate is doped 11015 cm3 phosphorus, what is the junction depth xj ?
(c) What is the sheet resistance of the diffused layer?,

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