Question: An exposure is performed with coherent light using a step-and-repeat projection printing system. The light source has a wavelength of 365 nm. The pattern is

An exposure is performed with coherent light using a step-and-repeat projection printing system. The light source has a wavelength of 365 nm. The pattern is a grating with a line-to-line spacing of 1 um. Assume kl = 0.4. (a) Calculate the minimum value of the numerical aperture (NA) which will provide contrast at the image plane (the plane of the resist, the areal image). (b) What is the maximum value of the numerical aperture, above which there will be no improvement in image quality? Assume kl = 1 (c) Calculate the depth of focus (DOF) of the image for cases (a) and (b). Assume k2 = 0.5

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