Question: Compare dry versus wet etching techniques. You can consider Si as an example, as needed Parameter Dry Etching Wet Etching Directionality Production-line Automation Environmental Impact

Compare dry versus wet etching techniques. You can consider Si as an example, as needed Parameter Dry Etching Wet Etching Directionality Production-line Automation Environmental Impact of Chemicals Used Masking Film Adherence Cost of Chemicals Selectivity Radiation Damage Cleanliness CD Control Equipment Cost Can be Used for Submicron Features

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