Consider the electrostatic actuator in the Fig.01. The gap between the dielectric material and the parallel plate
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Consider the electrostatic actuator in the Fig.01. The gap between the dielectric material and the parallel plate is denoted as d0. The spacing between parallel plates is d. The dielectric material, which is suspended by a spring on one side, is capable of moving in x direction. Friction is neglected. i. Obtain the force of the actuator. ii. Will pull-in occur? Justify your answer. iii. Find the displacement of the dielectric material if a voltage V is applied on the capacitor. iv. Calculate the force on the dielectric material and its displacement assuming that V=10V, L=500um, W (width of the parallel plate)=500um, εr=40, k=1N/m, d=100um and d0=5um.
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